Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography

Name: Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography
Author: Richard B. Hoover

by Richard B. Hoover

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X-ray astronomyCongressesMirrorsX-ray lithographyUltraviolet astronomyGrazing incidenceDesign and constructionExtreme ultraviolet lithographyX-ray opticsInstruments