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Functional integration of opto-electro-mechanical devices and systems

by Juha Rantala

Cover of Functional integration of opto-electro-mechanical devices and systems

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Microelectromechanical systemsCongressesMicroelectronic packagingOptoelectronic devicesOptoelectronics
Functional integration of opto-electro-mechanical devices and systems by Juha Rantala — book · Vinony