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VLSI metallization

by Norman G. Einspruch, Simon S. Cohen, Gennady Sh Gildenblat

Cover of VLSI metallization

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MetallizingDesign and constructionMetallic filmsIntegrated circuitsVery large scale integration
VLSI metallization by Norman G. Einspruch, Simon S. Cohen, Gennady Sh Gildenblat — book · Vinony