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Materials for Mechanical and Optical Microsystems

by M. Elwenspoek, Ernst Obermeier, H. Fujita

Cover of Materials for Mechanical and Optical Microsystems

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Materials, researchMeasure theoryMaterialsOptical filmsElectromechanical devicesCongressesMicroelectronicsThin films
Materials for Mechanical and Optical Microsystems by M. Elwenspoek, Ernst Obermeier, H. Fujita — book · Vinony