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Buffered oxide etch · Vinony

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EntityQ2927645· pop 8· linked from 9 articles

Buffered oxide etch

Chemical used in microfabrication

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Etching (microfabrication)

Sources

wikipedia.externallinksexternallink

aluminium

Entity

International Standard Book Number

digital object identifier

silicon dioxide

hydrofluoric acid

buffer solution

Brønsted–Lowry acid–base theory

photolithography

silicon nitride

ammonium fluoride

process control

ammonium bifluoride

Thermal oxidation

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What links here9 pages

micro-electromechanical systems

ammonium fluoride

hydrofluoric acid

semiconductor device fabrication

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