🌐EnglishEnglishDeutschEspañolFrançaisItalianoفارسی한국어中文日本語EntityQ644248· pop 9· linked from 93 articlesion beambeam of charged atoms (ions)Available in 9 languagesEspañolDeutschItalianoCatalanHebrewRomanianفارسی한국어via Wikidata sitelinks · CC0Connectionsspace chargeEntityNASAConceptCategoriesAccelerator physicsIonsPlasma technology and applicationsSemiconductor analysisSemiconductor device fabricationThin film deposition