🌐EnglishEnglishEspañolTiếng Việt한국어日本語EntityQ7201768· pop 5· linked from 18 articlesPlasma cleaningCleaning method using gasAvailable in 5 languagesEspañol中文Hungarian한국어via Wikidata sitelinks · CC0ConnectionsatomEntityoxygenEntityCategoriesCleaning methodsPlasma processingSemiconductor device fabrication