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trichlorosilane
Sign in to saveTrichlorosilane (TCS) is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds.
Chemical data
- Formula
- Cl3HSi
- Molecular weight
- 135.45 g/mol
- IUPAC name
- trichlorosilane
- SMILES
- [SiH](Cl)(Cl)Cl
- InChIKey
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N
- Polar surface area
- 0 Ų
- H-bond donors
- 0
- H-bond acceptors
- 0
- Formal charge
- 0
via PubChem
Wikidata facts
- Mass
- 133.891
Show 7 more facts
- Commons category
- Trichlorosilane
- canonical SMILES
- [SiH](Cl)(Cl)Cl
- chemical formula
- Cl₃HSi
- ionization energy
- 11.70
- melting point
- -128.2
- boiling point
- 33
- electric dipole moment
- 0.86
via Wikidata · CC0
~4 min read
Article
7 sectionsContents
- Production
- Uses
- Ingredient in hydrosilylation
- Organic synthesis
- Safety
- References
- External links
Trichlorosilane (TCS) is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds.
== Production == Trichlorosilane is produced by treating powdered metallurgical grade silicon with blowing hydrogen chloride at 300 °C in a hydrochlorination process. Hydrogen is also produced, as described in the chemical equation: Si + 3 HCl → HCl3Si + H2