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trichlorosilane

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EntityQ419041· pop 24· linked from 37 articles

trichlorosilane

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Trichlorosilane (TCS) is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds.

In the Vinony graph

Vinony's link graph records 37 inbound references to trichlorosilane, and connects out to aqueous solution, polycrystalline silicon and water.

It is catalogued under topics including Chembox having GHS data, Chembox image size set and Chlorosilanes.

Vinony links it to 23 Wikipedia language editions.

Chemical data

Formula
Cl3HSi
Molecular weight
135.45 g/mol
IUPAC name
trichlorosilane
SMILES
[SiH](Cl)(Cl)Cl
InChIKey
ZDHXKXAHOVTTAH-UHFFFAOYSA-N
Polar surface area
0 Ų
H-bond donors
0
H-bond acceptors
0
Formal charge
0

via PubChem

Wikidata facts

Has part
chlorine
Mass
133.891
Show 7 more facts
Commons category
Trichlorosilane
canonical SMILES
[SiH](Cl)(Cl)Cl
chemical formula
Cl₃HSi
ionization energy
11.70
melting point
-128.2
boiling point
33
electric dipole moment
0.86
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Encyclopedic overview

7 sections
Contents
  • Production
  • Uses
  • Ingredient in hydrosilylation
  • Organic synthesis
  • Safety
  • References
  • External links

Trichlorosilane (TCS) is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds.

== Production == Trichlorosilane is produced by treating powdered metallurgical grade silicon with blowing hydrogen chloride at 300 °C in a hydrochlorination process. Hydrogen is also produced, as described in the chemical equation: Si + 3 HCl → HCl3Si + H2

Excerpted from Wikipedia’s “trichlorosilane” article, available under the CC BY-SA 4.0 licence.

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