🌐EnglishEnglishNederlandsPortuguêsРусский한국어中文EntityQ20979684· pop 7· linked from 44 articles6 µm lithography processAlso known as 6µm, 6 µm process, 6 micron processsemiconductor manufacturing processes with a 6 µm MOSFET technology nodeAvailable in 7 languages中文PortuguêsWu Chinesezh_min_nanzh_yue한국어via Wikidata sitelinks · CC0Connectionssemiconductor device fabricationEntitylist of semiconductor scale examplesEntityCategories1971 introductionsInternational Technology Roadmap for Semiconductors lithography nodes