🌐EnglishEnglishEspañolFrançaisItalianoNederlandsPortuguêsРусскийالعربية한국어中文EntityQ1135970· pop 11· linked from 45 articles3 µm lithography processAlso known as 3µm, 3 µm process, 3 micron processsemiconductor manufacturing processes with a 3 µm MOSFET technology nodeAvailable in 11 languagesEspañolFrançais中文PortuguêsItalianoالعربيةWu Chinesezh_min_nanzh_yue한국어via Wikidata sitelinks · CC0Connectionssemiconductor device fabricationEntitylist of semiconductor scale examplesEntityCategoriesComputer-related introductions in 1975International Technology Roadmap for Semiconductors lithography nodes