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1.5 µm lithography process
Sign in to saveAlso known as 1.5µm, 1.5 µm process, 1.5 micron process
semiconductor manufacturing processes with a 1.5 µm MOSFET technology node
Wikidata facts
- Subclass of
- photolithography
- Followed by
- 1 µm lithography process
- Follows
- 3 µm lithography process
Show 1 more fact
- described by source
- International Technology Roadmap for Semiconductors
Sources (1)
via Wikidata · CC0
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via Wikidata sitelinks · CC0