🌐EnglishEnglishDeutschFrançaisItalianoРусскийفارسی한국어中文日本語EntityQ1069404· pop 11· linked from 47 articleschemical-mechanical planarizationpolishing technique used during semiconductor fabricationAvailable in 10 languagesFrançaisDeutsch中文日本語РусскийCatalanWu Chineseفارسی한국어ConnectionscopperEntityaluminiumEntityCategoriesSemiconductor device fabrication