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Copper interconnect · Vinony

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EntityQ605757· pop 7· linked from 54 articles

Copper interconnect

used in semiconductor integrated circuits

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Copper Integrated circuits

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wikipedia.externallinksexternallink

silicon

Entity

digital object identifier

International Standard Serial Number

integrated circuit

photolithography

semiconductor device fabrication

polyethylene glycol

titanium nitride

electrical resistivity and conductivity

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What links here54 pages

carbon nanotube

electromigration

semiconductor device fabrication

atomic layer deposition

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microfabrication

45 nm lithography process

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