Copper interconnect
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Connections
copper
Entity
aluminium
Entity
silicon
Entity
IBM
Entity
digital object identifier
Entity
International Standard Serial Number
Entity
integrated circuit
Entity
diffusion
Entity
Q259011
Company
Q180686
Entity
bibcode
Entity
Q229883
Entity
doping
Entity
Q22908627
Entity
photolithography
Entity
semiconductor device fabrication
Entity
polyethylene glycol
Entity
titanium nitride
Entity
damascening
Entity
electrical resistivity and conductivity
Entity