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deep reactive-ion etching · Vinony

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EntityQ486936· pop 8· linked from 60 articles

deep reactive-ion etching

highly anisotropic etch process

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Etching (microfabrication)Microtechnology Semiconductor device fabrication

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dynamic random-access memory

Entity

chemical reaction

digital object identifier

International Standard Serial Number

integrated circuit

functional group

polytetrafluoroethylene

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What links here60 pages

micro-electromechanical systems

microfabrication

Gaggenau Hausgeräte

sulfur hexafluoride

Reactive-ion etching

Robert Bosch Stiftung

European Inventor Award

Constructa-Neff

Franz Fehrenbach

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