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Reactive-ion etching · Vinony

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EntityQ1640159· pop 12· linked from 44 articles

Reactive-ion etching

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Categories

Etching (microfabrication)Plasma processing Semiconductor device fabrication

Sources

wikipedia.externallinksexternallink

via Wikidata sitelinks · CC0

plasma

Entity

chemical reaction

digital object identifier

International Standard Serial Number

electromagnetic field

sulfur hexafluoride

radio frequency

semiconductor wafer

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What links here44 pages

microfabrication

xenon difluoride

aluminum nitride

micro-electromechanical systems

deep reactive-ion etching

electromigration

Metal assisted chemical etching

inductively coupled plasma

Nanoimprint lithography

structural coloration

semiconductor device fabrication

Shallow trench isolation

Barkhausen effect

titanium carbide

Similar entities

Discovered by embedding cosine similarity (sentence-transformers MiniLM, 384-dim).

deep reactive-ion etching

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Metal assisted chemical etching

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Buffered oxide etch

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low-energy ion scattering

Entitydist 0.63

orthanilic acid

Entitydist 0.63

Reactive distillation

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Impact ionization

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electron ionization

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