電子線後方散乱回折法
Sign in to saveAlso known as EBSD
Method for material analysis. Backscattered electrons (BSEs) are produced by elastic collisions with atoms from the sample. BSEs produce an image that is related to material composition and orientation providing both spatial and chemical information.
Wikidata facts
- Image
- EBSD (001) Si.png
Show 3 more facts
- Commons category
- Electron backscatter diffraction
- studied by
- materials science
- uses
- Kikuchi line
Sources (2)
via Wikidata · CC0
Article · 日本語
電子線後方散乱回折法（でんしせんこうほうさんらんかいせきほう、Electron backscatter diffraction、略称：EBSD）とは、測定対象の物質に電子線を照射して試料表面から約50nm以下の領域の各結晶面で回折電子から生じた後方散乱回折を解析して結晶性材料の構造などを調べる手法。EBSP： Electron Backscatter Pattern、SEM-OIM、OIMとも呼ばれる。
Abstract from DBpedia / Wikipedia · CC BY-SA