🌐EnglishEnglishDeutschFrançaisItalianoNederlandsPolskiPortuguêsفارسی한국어中文日本語EntityQ1672063· pop 12· linked from 32 articlesion pumpAlso known as sputter ion pump, Noble diode pumptechnical device, a type of vacuum pumpWikidata factsImageIonPumpHead.jpgSources (3)wikidata.orgdocs.openalex.orgweb.archive.orgvia Wikidata · CC0Available in 12 languagesDeutsch中文日本語PortuguêsItalianoNederlandsNorwegian NynorskPolskiSerbianفارسی한국어ConnectionselectronEntitytitaniumEntityCategoriesVacuum pumps