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multiple patterning · Vinony

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EntityQ1917460· pop 9· linked from 27 articles

multiple patterning

Also known as multi-patterning

technique used to increase the number of structures that may be contained on a microchip

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Connections

extreme ultraviolet lithography

7 nm lithography process

Categories

Lithography (microfabrication)

Sources

wikipedia.externallinksexternallink

International Standard Book Number

Entity

Wayback Machine

random-access memory

digital object identifier

International Standard Serial Number

integrated circuit

Institute of Electrical and Electronics Engineers

Fudan University

dynamic random-access memory

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What links here27 pages

GlobalFoundries

7 nm lithography process

45 nm lithography process

14 nm lithography process

immersion lithography

Micron Technology

photolithography

Shanghai Micro Electronics Equipment

extreme ultraviolet lithography

3 nm lithography process

Nanoimprint lithography

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10 nm lithography process