🌐日本語EnglishDeutschPortuguêsРусский中文日本語EntityQ1917460· pop 9· linked from 27 articles多重露光Also known as multi-patterningtechnique used to increase the number of structures that may be contained on a microchipAvailable in 8 languagesDeutsch中文РусскийPortuguêsCatalanSerbianWu Chinesevia Wikidata sitelinks · CC0Connectionsextreme ultraviolet lithographyEntity7 nm lithography processEntityCategoriesLithography (microfabrication)