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EntityQ1672059· pop 5· linked from 22 articles

Ion beam lithography

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lithographic technique that uses a scanning ion beam

In the Vinony graph

Within Vinony's link graph, Ion beam lithography is referenced by 22 other articles, and connects out to electron beam lithography, International Standard Book Number and ion.

It is catalogued under the topic Semiconductor device fabrication.

Its subject is documented across 5 Wikipedia language editions.

Wikidata facts

Subclass of
lithography
Sources (3)

via Wikidata · CC0

Available in 5 languages

via Wikidata sitelinks · CC0

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