nanolithography
Sign in to saveNanolithography (NL) is a growing field of techniques within nanotechnology dealing with the engineering (patterning e.g. etching, depositing, writing, printing etc) of nanometer-scale structures on various materials.
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Within Vinony's link graph, nanolithography is referenced by 177 other articles, and connects out to electron beam lithography, electron and International Standard Book Number.
It is catalogued under the topic Lithography (microfabrication).
Its subject is documented across 19 Wikipedia language editions.
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Encyclopedic overview
23 sectionsContents
- History
- Etymology
- Photolithography
- Optical lithography
- Quantum optical lithography
- Scanning lithography
- Electron-beam lithography
- Scanning probe lithography
- Proton beam writing
- Charged-particle lithography
- Soft lithography
- PDMS lithography
- Microcontact printing
- Multilayer soft lithography
- Miscellaneous techniques
- Nanoimprint lithography
- Magnetolithography
- Nanofountain drawing
- Nanosphere lithography
- Neutral particle lithography
- Plasmonic lithography
- Stencil lithography
- References
Nanolithography (NL) is a growing field of techniques within nanotechnology dealing with the engineering (patterning e.g. etching, depositing, writing, printing etc) of nanometer-scale structures on various materials.
The modern term reflects on a design of structures built in range of 10−9 to 10−6 meters, i.e. nanometer scale. Essentially, the field is a derivative of lithography, only covering very small structures. All NL methods can be categorized into four groups: photo lithography, scanning lithography, soft lithography and other miscellaneous techniques.
Excerpted from Wikipedia’s “nanolithography” article, available under the CC BY-SA 4.0 licence.