nanolithography
Sign in to saveNanolithography (NL) is a growing field of techniques within nanotechnology dealing with the engineering (patterning e.g. etching, depositing, writing, printing etc) of nanometer-scale structures on various materials.
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23 sectionsContents
- History
- Etymology
- Photolithography
- Optical lithography
- Quantum optical lithography
- Scanning lithography
- Electron-beam lithography
- Scanning probe lithography
- Proton beam writing
- Charged-particle lithography
- Soft lithography
- PDMS lithography
- Microcontact printing
- Multilayer soft lithography
- Miscellaneous techniques
- Nanoimprint lithography
- Magnetolithography
- Nanofountain drawing
- Nanosphere lithography
- Neutral particle lithography
- Plasmonic lithography
- Stencil lithography
- References
Nanolithography (NL) is a growing field of techniques within nanotechnology dealing with the engineering (patterning e.g. etching, depositing, writing, printing etc) of nanometer-scale structures on various materials.
The modern term reflects on a design of structures built in range of 10−9 to 10−6 meters, i.e. nanometer scale. Essentially, the field is a derivative of lithography, only covering very small structures. All NL methods can be categorized into four groups: photo lithography, scanning lithography, soft lithography and other miscellaneous techniques.