🌐EnglishEnglishDeutschFrançaisPolskiPortuguêsTiếng ViệtTürkçeРусскийفارسیहिन्दी한국어中文日本語EntityQ256845· pop 21· linked from 115 articleselectron beam lithographyAlso known as e-beam lithographylithographic technique that uses a scanning beam of electronsAvailable in 19 languagesFrançaisDeutsch中文日本語РусскийPortuguêsहिन्दीCatalanCzechConnectionselectronEntityInternational Standard Book NumberEntityCategoriesElectron beamLithography (microfabrication)