Home›Browse›electron beam lithography🌐EnglishEnglishDeutschFrançaisPolskiPortuguêsTiếng ViệtTürkçeРусскийفارسیहिन्दी한국어中文日本語EntityQ256845· pop 21· linked from 115 articleselectron beam lithographySign in to saveAlso known as e-beam lithographylithographic technique that uses a scanning beam of electronsAvailable in 19 languagesFrançaisDeutsch中文日本語РусскийPortuguêsहिन्दीCatalanCzechEstonianFinnishHebrewPolskiTiếng ViệtTürkçeUkrainianفارسی한국어via Wikidata sitelinks · CC0