Home›Chemical vapor deposition›Plasma-enhanced chemical vapor deposition🌐EnglishEnglishDeutschFrançaisItalianoNederlandsPolskiPortuguêsРусскийفارسی中文日本語EntityQ905958· pop 10· linked from 52 articlesPlasma-enhanced chemical vapor depositionAlso known as PECVDUltra thin coating processAvailable in 10 languagesFrançaisDeutsch日本語РусскийItalianoCatalanNederlandsSlovakفارسیConnectionshydrogenEntityoxygenEntityCategoriesChemical vapor depositionPlasma processingSemiconductor device fabricationThin film deposition