
スパッタリング
Sign in to savethumb|250px|A commercial AJA Orion sputtering system at Cornell NanoScale Science and Technology Facility thumb|Ion thruster operating on iodine (yellow) using a xenon (blue) hollow cathode. High-energy ions emitted from Spacecraft electric propulsion|plasma thrusters sputter material off the surrounding test chamber, causing problems for ground testing of high-power thrusters. In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas. It occurs natural
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Article · 日本語
スパッタリング(Sputter deposition)は、 1. * 絵画などで使われる手法のこと。 2. * 真空蒸着に類する薄膜製造の代表的な方法の1つ。 3. * 焼き物や炒め物の調理時に発生する急激な油はねの現象。 1と2について本稿で記述する。
Abstract from DBpedia / Wikipedia · CC BY-SA